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S530 parametric test with KTE V7.1 software to accelerate semiconductor device production

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With the release of KTE V7.1 software for Keithley 's S530 Series Parametric Test System,Tektronix aims to accelerate the development of semiconductor devices at a time when demand for these chips has never been higher.

Among the options available for the first time in KTE Release 7.1 are a new parallel testing feature and the ability to perform high-voltage capability testing, which is particularly useful for next-generation power devices and those made from Wide BandGap ( WBG ) materials.

By reducing test times by more than 10% compared to KTE V5.8, downtime can be reduced and chips can be manufactured much faster.

The increasing deployment of 5G technology and the growth of IoT applications have helped to fuel demand for semiconductors.

Shortages of components on a global scale require not only an increase in production, but also the ability to test new chips being developed more quickly.

The release of this test system by Tektronix can help speed up the production process by decreasing test times, which means new chips can be brought to market more quickly.

KTE release 7.1 takes advantage of the improvements in functionality and throughput made to the S530 system since the release of KTE 7.0.

The new testhead has been designed to provide the flexibility needed when using different probe card models.

The updated hardware and software support single-pass testing, which benefits throughput.

On the service side, the newly introduced SRU (System Reference Unit) allows calibration to be carried out in less than 8 hours, which can then be completed during a normal work shift.

The SRU can be purchased directly or, alternatively, an SSO service plan can be subscribed to.

Main improvements and new features

Parallel testing functionality improves productivity and reduces testing costs

Available for the first time on the KTE V7.1 release, the parallel testing option for the S530 system further increases productivity and reduces testing costs: the expected range of improvement is in the order of 30%, depending on tests and facilities.

Based on the S530's innovative hardware architecture that allows up to eight high-resolution SMUs to connect to any test pin through any Kelvin line/pin in the system, Keithley's parallel test software optimizes the efficiency of all system resources to maximize test throughput.

High-voltage capacitance testing functionality for the latest power devices and WBGs

Nowadays it is necessary to test high-voltage devices.

The demand for chips capable of switching faster and more efficiently is increasing all the time.

Increased efficiency not only helps to reduce consumption and the heat generated, but also to reduce the environmental impact.

In order to test these wide-band prohibited devices at higher operating voltages, designers have to move from R&D labs to manufacturing plants.

The HVCV (High Voltage Capacitance Voltage) option, available in KTE release 7.1, is a unique feature that combines with the market's unique single-pass test solution capable of making measurements in the range of 200 to 1,000 V, and gives the ability to test capacitances with a bias of up to 1,100 VDC.

This production-ready capability allows precision measurements of Cdg, Cgs and Cds to support characterisation and performance testing of the input and output transients of a power device.

Testing up to 1,100 V on each pin via a single probe contact

In addition to delivering and measuring voltages up to 1,100 V, an S530-HV system provides the ability to configure up to two Model 2470 high-voltage SMUs, while the high-voltage switching matrix within the S530-HV allows the user to perform these measurements on any test pin at any time.

This provides the flexibility to meet the pinout requirements of a wide range of test structures and devices, eliminating the throughput penalties and high costs associated with different approaches involving two-pass testing or the use of dedicated pins.

Comments

Peter Griffiths, general manager of Systems & Software at Tektronix, said: "Emerging technologies in analogue, power and WBG devices made from SiC and GaN require parametric testing to optimise measurement performance, support a wide variety of products and minimise costs. Our customers, which include the world's leading chipmakers, will appreciate the enhancements in KTE V7.1 that will allow engineers to quickly develop the innovations needed to meet the demands of changing markets.

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